| 摘要 |
PROBLEM TO BE SOLVED: To enable free movement of a carrying vessel main body in a specified range and self-centering of the carrying vessel, by installing a retaining pedestal for retaining an object to be carried, and the carrying vessel main body which is engaged with the outer peripheral parts, interposing a specified amount of gap, and movably installed. SOLUTION: A carrying vessel 2 accommodates a work 35 such as a semiconductor wafer or a semiconductor integrated circuit device 36 having a semiconductor integrated circuit and is used when the work 35 is carried. The carrying vessel 2 comprises a first telescopic member 2a as a retaining pedestal for retaining the work 35, a second telescopic member 2b retaining the first telescopic member 2a, and a carrying vessel main body 2b which is engaged with an outer peripheral part 2c of the first telescopic member 2a interposing a specified amount of gap and movably installed. The first telescopic member 2a and the second telescopic member 2b are fastened by using a fastening part 2e and collectively form an unified telescopic member 2f. Since the telescopic member 2f is engaged with the carrying vessel main body 2b interposing a specified amount of gap, the carrying vessel main body 2b can be freely moved to the telescopic member 2f in a specified range. |
