发明名称 |
SENSING ELEMENT OF MATRIX TACTILE SENSOR |
摘要 |
FIELD: measurement technology. SUBSTANCE: sensing element has base, matrix of pressure sensing members placed on base, and polymeric film above matrix. Polymeric film is fixed on base over matrix perimeter and space formed by polymeric film and base is filled with gas medium of reduced gas concentration. Under normal operating conditions, gas concentration is between <EMI ID=0.511 HE=6 WI=15 TI=CHI> and <EMI ID=0.512 HE=6 WI=21 TI=CHI>. EFFECT: improved reliability due to better bonding between film and matrix surface. 1 cl, 2 dwgn
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申请公布号 |
RU2118871(C1) |
申请公布日期 |
1998.09.10 |
申请号 |
RU19960117020 |
申请日期 |
1996.08.21 |
申请人 |
NAUCHNO-PROIZVODSTVENNYJ KOMPLEKS "TEKHNOLOGICHESK;IJ TS |
发明人 |
GODOVITSYN I.V.;SHELEPIN N.A.;PARMENOV JU.A. |
分类号 |
H01L23/08;(IPC1-7):H01L23/08 |
主分类号 |
H01L23/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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