发明名称 ARRAY SUBSTRATE FOR PLANE DISPLAY DEVICE AND PRODUCTION THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To prevent the step of an ITO film consisting of a pixel electrode from being cut on the terminal edge of a source electrode by forming a contact hole to expose the terminal edge of the source electrode and connecting the source electrode and the pixel electrode through a conductive layer at a section directly covering this terminal edge. SOLUTION: A source electrode 126b is connected with a pixel electrode 11 through a contact hole 129 provided on an inter-layer covering insulating film 127. A terminal edge 129a of the contact hole 129 on the side to be connected with the pixel electrode 131 is located a little outside a correspondent terminal edge 126c of the source electrode 126b. Namely, the contact hole 129 is formed while being protruded from the upper surface of the source electrode 126b to the side of the pixel electrode. Then, the terminal edge 126c of the source electrode 126b is not covered with the inter-layer covering insulating film 127 but is covered only with the ITO film consisting of the pixel, electrode 131. The cover insulating property of the ITO film is extremely improved in comparison with the inter-layer covering insulating film 127. Therefore, the step of that film is not cut on the terminal edge 126c.</p>
申请公布号 JPH11202360(A) 申请公布日期 1999.07.30
申请号 JP19980003291 申请日期 1998.01.09
申请人 TOSHIBA CORP 发明人 KUBO AKIRA;KASHIMOTO MIYUKI
分类号 G02F1/136;G02F1/1368;H01L21/306;H01L21/336;H01L29/786;(IPC1-7):G02F1/136 主分类号 G02F1/136
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