| 摘要 |
PROBLEM TO BE SOLVED: To easily form a functional thin film on a base material at a low cost by turning an anode electrode of a roll shape of an atmospheric pressure plasma processing device while supporting a cylindrical base material. SOLUTION: A plasma generating device body 2 comprises an aluminum cathode electrode 3, a fluoro-resin cylindrical body 4 and an anode electrode 5. An outlet 31 to feed the gas is provided in a tip part of the cathode electrode 3, and connected to a high frequency oscillator 7, the anode electrode 5 of a roll shape is grounded, and a cylindrical base material 9 is turned while supported. The film forming gas is associated with the carrier gas, and fed to the plasma generating device body 2 together with the main gas to generate the plasma. The high frequency voltage is applied from the high frequency oscillator 7 between the cathode electrode 3 and the anode electrode, the atmospheric pressure glow discharge plasma is generated to form a functional thin film on the surface of the rotating cylindrical base material 9.
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