发明名称 Discrete polymer memory array and method of making same
摘要 The invention relates to discrete, spaced-apart ferroelectric polymer memory device embodiments. The ferroelectric polymer memory device is fabricated by spin-on polymer processing and etching using photolithographic technology. The size of the discrete, spaced-apart ferroelectric polymer structures may be tied to a specific photolithography minimum feature dimension.The invention also relates to a process for making embodiments of a polymer memory device that includes discrete, spaced-apart ferroelectric polymer structures. The discrete, spaced-apart ferroelectric polymer structures may have a minimum feature that is tied to the current photolithography that may reduce the voltage and increase the switching speed.
申请公布号 US6858862(B2) 申请公布日期 2005.02.22
申请号 US20010896656 申请日期 2001.06.29
申请人 INTEL CORPORATION 发明人 LI JIAN;MU XIAO-CHUN
分类号 G11C11/22;H01L27/115;H01L29/06;H01L29/12;H01L33/00;(IPC1-7):H01L29/06 主分类号 G11C11/22
代理机构 代理人
主权项
地址