DUV and VUV laser with on-line pulse energy monitor

摘要

A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F₂) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse energy stabilization to the same degree of accuracy, which is crucial for stability of exposure dose and other process parameters in microlithography and industrial applications.