发明名称 PROBE CARD CONFIGURATION FOR LOW MECHANICAL FLEXURAL STRENGTH ELECTRICAL ROUTING SUBSTRATES
摘要 A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface
申请公布号 WO2005069914(A3) 申请公布日期 2006.08.31
申请号 WO2005US01551 申请日期 2005.01.18
申请人 FORMFACTOR, INC.;SHINDE, MAKARAND, S.;LARDER, RICHARD, A.;COOPER, TIMOTHY, E.;SHENOY, RAVINDRA, V.;ELDRIDGE, BENJAMIN, N. 发明人 SHINDE, MAKARAND, S.;LARDER, RICHARD, A.;COOPER, TIMOTHY, E.;SHENOY, RAVINDRA, V.;ELDRIDGE, BENJAMIN, N.
分类号 G01R31/02;G01R31/28 主分类号 G01R31/02
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