MEMS SWITCH ACTUATING BY THE ELECTROSTATIC FORCE AND PIEZOELECRIC FORCE

摘要

A MEMS(Micro Electro Mechanical Systems) switch is provided to prevent stiction from occurring between contact points by turning the switch on and/or off by using electrostatic and piezoelectric forces. A first contact point(120) is positioned in a predetermined first area on an upper surface of a substrate(110). A support layer(130) is suspended at a predetermined distance from the upper surface of the substrate. A second contact point(140) is formed on a lower surface of the support layer. A first actuator(150) moves the support layer in a predetermined direction by using an electrostatic force. A second actuator(160) moves the support layer in a predetermined direction by using a piezoelectric force. If a predetermined first power source is connected to the first actuator, the first actuator moves the support layer toward the substrate so that the second contact point contacts the first contact point.