发明名称 |
Shielded probe for testing a device under test |
摘要 |
A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe measurement system preferably includes a probe having a conductive path extending between the first and second surfaces of a membrane and a probe contact electrically connected to the conductive path.
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申请公布号 |
US7271603(B2) |
申请公布日期 |
2007.09.18 |
申请号 |
US20060391895 |
申请日期 |
2006.03.28 |
申请人 |
CASCADE MICROTECH, INC. |
发明人 |
GLEASON K. REED;LESHER TIM;ANDREWS MIKE;MARTIN JOHN |
分类号 |
G01R31/02;G01R1/067;G01R1/073 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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