Apparatus and method for preparing samples

摘要

Apparatus and method capable of preparing good samples (6) adapted for observations by electron microscopy are offered. Each sample (6) is ion-etched. During this process, the sample stage (4) is tilted reciprocably left and right about a tilting axis (k). The sample (6) is ion-etched together with a shielding material (12). The sample (6) may contain a substance (M) that is not easily etched by the ion beam (IB). In the past, unetched portions have been produced due to such a substance (M) that blocks the ion beam (IB). In the present invention, such unetched portions are not produced in spite of the presence of the substance (M). The substance (M) can be separated from the sample (6). The ion beam (IB) is directed at the sample (6) with the boundary defined by an end surface (12a) of the shielding material (12). Portions of the sample (6) at a processing position and its vicinities are etched by the beam. A desired cross section (S) of the sample (6) is obtained and will be observed by the operator with a scanning electron microscope or other instrument.