| 摘要 |
A transfer carrier of a vertical type furnace is provided to stabilize a diffusion process and to prevent an extrusion error in loading or unloading a wafer by including a wafer alignment unit. A cassette is carried in or carried out a transfer stage(160) by a cassette transfer in a home position of a wafer alignment unit(161). A rotation movement sensing part senses a home position of a bar rotation unit(163). A horizontal movement sensing part senses a home position of a horizontal movement part(164). If the cassette is carried in the transfer stage, the cassette is fixed in the transfer stage by a cassette lock signal of a control part. An alignment bar(162) is rotated by operating the bar rotation part.
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