| 摘要 |
The present invention is to provide a device capable of suppressing abnormality of the shape of a film when processing the film, and a manufacturing method thereof. The manufacturing method of a device comprises the steps of: forming a film on a second surface side of a substrate having a first surface and a second surface; partially forming a groove on the substrate to allow the film to remain from the first side; and injecting a material from the second surface side, and removing the film on the second surface side of the formed portion. |
