发明名称 X線回折装置およびX線回折測定方法
摘要 There is provided an X-ray diffraction apparatus configured to irradiate a sample S on a sample stand with X-rays generated from an X-ray source and detect the X-rays diffracted by a sample using a detector, including a virtual mask setting section and a signal processing section. The detector outputs detection signals according to intensity of the X-rays received by detection elements, for each of the plurality of detection elements forming a detection surface. The virtual mask setting section is capable of setting a virtual mask on the detection surface of the detector, and setting at least an opening dimension of the virtual mask as an opening condition of the virtual mask independently in an X direction and a Y direction. The signal processing section processes the detection signals outputted from the detector according to the opening condition of the virtual mask set in the virtual mask setting section.
申请公布号 JP5944369(B2) 申请公布日期 2016.07.05
申请号 JP20130243506 申请日期 2013.11.26
申请人 株式会社リガク 发明人 小林 信太郎;光永 徹;梶芳 功系兆;新井 和良
分类号 G01N23/205;G01N23/207 主分类号 G01N23/205
代理机构 代理人
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