发明名称 LIQUID INJECTION CONTROL DEVICE, AND LIQUID INJECTION SYSTEM AND CONTROL METHOD
摘要 PROBLEM TO BE SOLVED: To enable the strength of pulsed liquid jet to be set according to a user's intention so as to improve user-friendliness.SOLUTION: In a liquid injection control device 70-1, an operation part 71 includes an energy dial 811 for inputting an energy indication value related to kinetic energy of pulsed liquid jet injected from a liquid injection device, and a repeating frequency dial 813 for inputting a repeating frequency indication value related to the number of times of injections per unit time of the pulsed liquid jet. A control part 75 includes a voltage amplitude setting part 753 for setting a voltage amplitude of a drive voltage waveform so that the kinetic energy is the energy indication value based on a rising index value related to the rising of the drive voltage waveform and the repeating frequency indication value.SELECTED DRAWING: Figure 13
申请公布号 JP2016120023(A) 申请公布日期 2016.07.07
申请号 JP20140261255 申请日期 2014.12.24
申请人 SEIKO EPSON CORP 发明人 KARASAWA JUNICHI
分类号 A61B17/32;F04B43/04;H01L41/09 主分类号 A61B17/32
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