| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement system capable of detecting a contact failure by a measuring device.SOLUTION: A measurement system 10 includes a tester body 20 that measures the electrical characteristics of a device 11 by making a force terminal 13 and sense terminal 14 come into contact with a device pin 12 in a Kelvin contact method and outputting a predetermined voltage to the force terminal 13. The measurement system is provided with first and second paths 21 and 22 for detecting whether or not the force terminal 13 and sense terminal 14 are in contact with the device pin 12 of the device 11; and measures voltages generated at the force terminal 13 and sense terminal 14 via the first and second paths 21 and 22 so as to detect that either one of the force terminal 13 and sense terminal 14 is not in contact with it.SELECTED DRAWING: Figure 1 |
