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发明名称
FORMING METHOD FOR SINGLE CRYSTAL THIN FILM
摘要
申请公布号
JPH01161823(A)
申请公布日期
1989.06.26
申请号
JP19870320920
申请日期
1987.12.18
申请人
SONY CORP
发明人
NOGUCHI TAKASHI
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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