SEMICONDUCTOR SUBSTRATE CLEANING DEVICE,申请号JP19920253869-传众专利搜索

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发明名称	SEMICONDUCTOR SUBSTRATE CLEANING DEVICE
摘要
申请公布号	JPH0684874(A)	申请公布日期	1994.03.25
申请号	JP19920253869	申请日期	1992.08.28
申请人	HIROSHIMA NIPPON DENKI KK	发明人	MATSUMOTO TORU
分类号	H01L21/304;B08B6/00;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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