| 摘要 |
PURPOSE:To automate supply and fetch of carrier plates, wafers, and wafer carriers to an adhesion apparatus by inverting the front and rear of a carrier plate before the adhesion part before the carrier plate is supplied to the adhesion part. CONSTITUTION:A carrier plate transferer sucks a carrier plate 7 carried to the heating part by means of a first suction means 322, inverts the carrier plate 7 by rotating a shaft 318, turns down a plane where the carrier plate 7 is to be adhered, and mounts it to the pedestal 4 of an adhesion means 128. A carrier plate 7 carrying a wafer is sucked by a second suction device, lifted from above the pedestal 4, and inverted by rotating the shaft to turn up a plane carrying a carrier plate 7; then, it is carried up to an inversion table. Thereafter, wafers and carrier plates can be fed into positions optimum for adhesion. |
