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发明名称
SEMICONDUCTOR DEVICE AND POLISHING THEREOF
摘要
申请公布号
JPH09181023(A)
申请公布日期
1997.07.11
申请号
JP19950351053
申请日期
1995.12.25
申请人
SONY CORP
发明人
IKEDA KIYOSHI
分类号
H01L21/66;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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