| 摘要 |
PURPOSE:To prevent a dedicated electrode from being deformed due to arc heat at the generation of arcs and maintain a constant distance between electrodes with high reproducibility, by producing an inert gas atmosphere in the area between the dedicated electrode and a portion to be bonded, applying voltage across them, and performing bonding immediately thereafter. CONSTITUTION:A dedicated electrode 11 is positioned above a portion to be bonded of the surface of a lead terminal 4. Inert gas, such as He and Ar, is jetted out of a nozzle 10 to produce an inert gas atmosphere in the area between the dedicated electrode 11 and the lead terminal 4. Then voltage is applied across them by means of a power supply 12 to cause dielectric breakdown and generate arcs 13. The dedicated electrode 11 is moved out of the reach of capillary 5 operation, and then bonding is performed by ultrasonic waves or heat through the capillary 5. Thus a metal wire 6 is not involved in the generation of arcs, which makes it possible to perform bonding by the capillary tip 5. |
