摘要 |
PROBLEM TO BE SOLVED: To obtain pits free of differences in level between a first layer and a second layer by forming grooves and pits varying in depth on the same master disk. SOLUTION: A first photoresist layer 2 is formed on a glass substrate 1 and an intermediate layer 3 consisting of an oxidized film is formed on this first photoresist layer 2. A second photoresist layer 4 is formed on this intermediate layer 3. The grooves 5 and the pits 6 are formed by the first light A to sensitize the second photoresist layer 4 and the second light B to sensitize the first photoresist layer 2 are formed. The first photoresist layer 2 is developed and the intermediate layer 3 is removed. The first photoresist layer 2 is developed, by which the photoresist master disk 7 of an optical disk is produced. The photosensitive sensitivity characteristic of the first photoresist layer 2 is higher than the photosensitive sensitivity characteristic of the second photoresist layer 4. |