Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber

摘要

Equipment (2) for substrate transport between two stations (6, 8) comprises a swivel arm (14, 18) of variable swivel radius. An Independent claim is also included for a method of transporting a substrate (4), especially using the above equipment, in which the substrate (4) is swiveled about a pivot axis from a first station to a second station and the swivel radius is varied simultaneously or after a delay.