Framställning av metallkarbidskikt med fullerener som kolkälla

摘要

The preparation of at least one epitaxial metal carbide layer on a substrate comprises reacting a carbon source with a metal (e.g. metal atoms obtained by vaporisation or sputtering) so that fullerenes and metal atoms are adsorbed onto the substrate surface and react chemically with each other to form a metal carbide layer. A flux of (preferably solid, e.g. powdered) fullerenes is used and the reaction temperature is relatively low, preferably at ca. 400 deg. C. - Preferably a magnesia substrate is used. The metals used are titanium, molybdenum, tungsten or hafnium to form the corresponding metal carbide layers.