| 摘要 |
<p>PURPOSE:To provide a leakage sensing device for a dust-proof filter such as one used in a clean room where no spatial storing place is not required in which its structure is simple, its weight is light and its disassemblying and assemblying operations can be easily carried out. CONSTITUTION:A holding block 50 is attached in flush with a filter surface of a dust-proof filter 1. First rails 61 and 62 are held in parallel with a first desired direction under an optional spacing and length on a plane parallel with a filter surface. A second rail 64 is held in a second desired direction crossing with the first desired direction by a pair of sliding blocks 60 slidably fitted to each of the first rail, respectively and then a carrier 70 having a collecting funnel 71 is caused to run by itself on the second rail 64.</p> |
