METHOD AND APPARATUS FOR TRANSPORTING A SUBSTRATE USING NON-NEWTONIAN FLUID

摘要

A method and an apparatus for transporting a substrate by using non-Newtonian fluid are provided to transport easily the substrate by using a non-Newtonian fluid. A chamber(216) includes a cavity having a shape of conduit. The conduit is disposed to transfer a non-Newtonian fluid(210) for transporting of a substrate(212). An input port is installed in a wall of the chamber. The input port is disposed to transfer the non-Newtonian fluid into the chamber. The chamber has an input end and an output end. The input end is used for defining a first opening for receiving the substrate. The output end is used for defining a second opening for outputting the substrate.