| 摘要 |
A system for controlling an exhaust valve is provided to reduce process errors and increase stability by maintaining constantly pressure within an exhaust tube. An exhaust control unit(100) generates a control signal for exhaust pressure. An exhaust valve unit(300) maintains the exhaust pressure by opening or shutting a shutter according to the control signal. A connective cable(200) is installed between the exhaust control unit and the exhaust valve unit in order to relay the control signal of the exhaust control unit and a state signal of the exhaust valve unit. The valve unit includes a sensor part having a differential pressure sensor, an operating part having a linear actuator, a rod pin, a first rod, and a second rod, and a shutter part having a first and a second shutter.
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