发明名称 METHOD FOR INSPECTING SOLDER BALL, APPARATUS FOR INSPECTING SOLDER BALL OF SEMICONDUCTOR COMPONENT IMPLEMENTING THE SAME, AND APPARATUS FOR TRANSMITTING SOLDER BALL OF SEMICONDUCTOR COMPONENT
摘要 A method for inspecting solder balls, an apparatus for examining the solder balls of a semiconductor device employing the same, and an apparatus for transferring the solder balls of the semiconductor device are provided to determine an attachment status of the solder balls without using a camera by using a determination processing unit. Solder balls(3) received in a solder ball receiving die(120) are bonded to a solder ball transferring die(130). The solder ball transferring die has plural ball accommodating grooves that make the divided solder balls be placed on a semiconductor element. At least one electricity pattern(140) connects the ball accommodating grooves of the solder ball transferring die so that both ends of two solder balls are shorted. A short detecting unit detects whether or not the electricity pattern is shorted. A determination processing unit determines whether or not the solder balls are correctly bonded to the ball accommodating grooves based on the short of the electricity pattern.
申请公布号 KR20060132404(A) 申请公布日期 2006.12.21
申请号 KR20050052734 申请日期 2005.06.18
申请人 SAMSUNG TECHWIN CO., LTD. 发明人 LEE, JIN WOO
分类号 H01L21/60;H01L21/66 主分类号 H01L21/60
代理机构 代理人
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