发明名称 Method for forming an optoelectronic device having an isolation layer
摘要 Methods are disclosed for forming optoelectronic devices. In one example of such a method, a substrate is provided and a partially conductive bottom mirror formed thereon. An active region is then formed on the bottom mirror, and a top mirror formed on the active region. A gain guide is then formed in the top mirror. Finally, a substantially dielectric isolation layer, as well as a resonant reflector, are formed on the top mirror. The isolation layer is interposed between the resonant reflector and the top mirror, and the isolation layer is formed so as to substantially prevent energy in an evanescent tail of a guided mode associated with the resonant reflector from entering the top mirror.
申请公布号 US7288421(B2) 申请公布日期 2007.10.30
申请号 US20040884895 申请日期 2004.07.06
申请人 FINISAR CORPORATION 发明人 COX JAMES ALLEN;MORGAN ROBERT A.
分类号 H01L21/00;G02B6/34;H01S5/183;H01S5/187;H01S5/20;H01S5/40;H01S5/42 主分类号 H01L21/00
代理机构 代理人
主权项
地址