ADAPTIVE CONTROLLER FOR ION SOURCE

摘要

An ion source (406), often used for materials processing applications in a vacuum processing chamber (410), is provided with an adaptive control system (426). The adaptive control system (426) has a microprocessor (425) and memory (427) that regulate the inputs of power (402) and gas flow (416) into the ion source (406). The adaptive control system (426) monitors and stores the dynamic input impedance properties and status of input devices (402, 407, 416) to the ion source (406). The adaptive control system (426) may additionally control magnetic fields (407) within the ion source (406). The adaptive control system (426) provides a multivariable control for driving any combination of input power (402), gas flow (416), magnetic field (407), or electrostatic ion beam extraction or acceleration field into the ion source (406).