LITHOGRAFIEOBJEKTIV MIT AUSWECHSELVORRICHTUNG FÜR EIN OPTISCHES ELEMENT UND HERSTELLUNGSVERFAHREN MITTELS DIESES LITHOGRAFIEOBJEKTIVES

摘要

A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.