Method for improving solar cell manufacturing yield

摘要

A method is described for protecting photovoltaic cells. During the fabrication process, a photovoltaic cell can be received from a first processing station. The photovoltaic cell can have at least one exposed surface, which may include crystalline silicon or oxidized crystalline silicon. The photovoltaic cell can then be placed in a controlled microenvironment with controlled chemical content, which can protect the exposed surface of the photovoltaic cell from contamination. Subsequently, the photovoltaic cell can be moved toward and delivered to a second processing station in the controlled microenvironment.

主权项

1. A method for protecting processed substrates during fabrication of photovoltaic structures, the method comprising:
receiving a processed substrate from a first wet processing station, wherein the substrate has at least one exposed surface, and wherein the exposed surface comprises crystalline silicon or oxidized crystalline silicon; placing the substrate in a controlled microenvironment filled with a gas that does not react with the exposed surface of the substrate, the gas being maintained at a pressure between 760 and 770 Torr; moving the substrate toward a second processing station in the controlled microenvironment; and delivering the substrate to the second processing station.