| 摘要 |
The present invention provides a linear evaporation deposition apparatus. The linear evaporation deposition apparatus includes a hopper, a buffer block, a nozzle block, and a heating means. The hopper is provided in a vacuum container to receive an evaporation material in powder and to discharge down the evaporation material through an opening/closing unit. The buffer block receives the evaporation material from the hopper, and heats the evaporation material to generate steam. The buffer block has a buffer space extending in a first direction in the vacuum container. The buffer block is formed of a conductive material. The nozzle block is provided in the vacuum chamber, and has the shape of a rectangular parallelepiped with a predetermined length extending in a first direction, a predetermined width formed in a second direction perpendicular to the first direction, and a predetermined height formed in a third direction perpendicular to the second direction. The nozzle block includes a plurality of penetration nozzles, and is installed in the buffer block and formed of a conductive material. The heating means is provided in the vacuum chamber to surround the nozzle block and the buffer block, and to heat the nozzle block and the buffer block. The penetration nozzles communicate with the buffer space of the buffer block. Each penetration nozzle is formed in the third direction. The penetration nozzles are spaced apart from each other in the first direction while being parallel to each other, and discharge steam from the buffer space. |
