发明名称 VERTICAL TYPE NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 An embodiment of the present invention relates to a semiconductor apparatus and a manufacturing method thereof and, more specifically, to a vertical channel type memory device including memory cells three-dimensionally arranged and a manufacturing method thereof. According to the embodiment of the present invention, the memory device can have a channel length of several hundred nanometers without a high-priced lithography process and has a vertically stackable structure, thereby implementing a high-integrated organic memory device by a low-priced solution process.
申请公布号 KR101656375(B1) 申请公布日期 2016.09.09
申请号 KR20150080127 申请日期 2015.06.05
申请人 INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY 发明人 PARK, CHEOL MIN;HWANG, SUN KAK
分类号 H01L27/115 主分类号 H01L27/115
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