发明名称 |
VERTICAL TYPE NON-VOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
An embodiment of the present invention relates to a semiconductor apparatus and a manufacturing method thereof and, more specifically, to a vertical channel type memory device including memory cells three-dimensionally arranged and a manufacturing method thereof. According to the embodiment of the present invention, the memory device can have a channel length of several hundred nanometers without a high-priced lithography process and has a vertically stackable structure, thereby implementing a high-integrated organic memory device by a low-priced solution process. |
申请公布号 |
KR101656375(B1) |
申请公布日期 |
2016.09.09 |
申请号 |
KR20150080127 |
申请日期 |
2015.06.05 |
申请人 |
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY |
发明人 |
PARK, CHEOL MIN;HWANG, SUN KAK |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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