| 摘要 |
Two kinds of light sources, one of which emits a coherent light and the other of which emits incoherent light, are provided. The coherent light and incoherent light respectively emitted from the two different kinds of light sources, proceed on the same optical axis. A photomask, such as for an integrated-circuit, or other objects, which have linear straight line features and nonlinear defects, are simultaneously illuminated by the coherent light and incoherent light. |
