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发明名称
VORRICHTUNG ZUR SCHWEBEVERDAMPFUNG IM ULTRAHOCHVAKUUM
摘要
申请公布号
DE1907542(B2)
申请公布日期
1976.10.28
申请号
DE19691907542
申请日期
1969.02.11
申请人
发明人
分类号
B01D3/10;C23C14/24;C23C14/26;H05B6/32;(IPC1-7):C23C13/08
主分类号
B01D3/10
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