| 摘要 |
PURPOSE:To favorably suppress the vibration of a device-placing base by guidingly supporting the displacement of the movable shafts of linear motors via leaf springs and operating same so as to offset vibration based on the detected results of vibration sensors installed thereto. CONSTITUTION:As the base plate 1 of a fixed portion is vibrated because of earthquake or a slight shock, etc., the vibration is propagated to suspendedly supported first and second air tanks 3a, 3b as supporting bases in a delayed condition from the vibration in the horizontal direction, while being released in order and absorbing slight shocks by plural stages of first and second air springs 4a, 4b in the vertical direction. Through these first and second air springs 4a, 4b, finally, vibration of a long period is propagated to a device- placing base 6 while detecting the long-period vibration by vertical sensors 13 and a horizontal sensor to operate vertical direction controlling linear motors 9, a horizontal direction controlling linear motor 10 and an unshown linear motor provided at a right angle thereto based on the vibration to suppress the transmission of vibration to the device-placing base 6. |
