| 摘要 |
PURPOSE:To measure the film thickness nondestructive method, by irradiating electron rays on thin film test piece under vacuum and measuring the transmitted current. CONSTITUTION:A thin film test piece 3 is located in a bell jar 2 which is evacuated with a vacuum pump 1, and electron rays are given to the surface of the sample 3 from an electronic gun driven with a control power supply 4. In this case, the transmitted current of the thin film sample 3 is detected by an ammeter 6 to measure the film thickness. |
