| 摘要 |
PURPOSE:To enhance operability in performing qualitative analysis and to shorten an analytical time, by simultaneously displaying a plurality of energy regions spaced apart from each other on the same picture at every element. CONSTITUTION:Characteristic X-rays 3 generated from a specimen 2 by the irradiation of electron beam 1 are detected by a detector 4 and the pulse like signal obtained from the detector 4 is differentiated by a wave form shaping circuit 5 and subsequently receives AD conversion to be collected in data memory 7. The spectrum data collected in the data memory 7 receives two-dimensional conversion by a data converting circuit 8 to be displayed on a display means 11 through display memory 10. When an atomic number or elemental mark is indicated by a keyboard 12, a control apparatus 9 reads data showing a plurality of energy regions, spaced apart from each other, where characteristic X-rays of the element indicated from the data stored in the memory built in said apparatus 9 and also generates a marker signal and the definite range of each spectrum is enlarged (contracted) to be displayed on a display means 11 along with a KLM marker. |
