| 摘要 |
PURPOSE:To prevent abrasive liquid from leaking or mixing, by providing a dischrage port in the discharged lapping liquid receiving member of a lapping device and selectively discharging lapping liquid or water from a plurality of discharge liquid receiving units through turning motion of a discharge trough. CONSTITUTION:Between a horizontally rotated lower surface plate 12 and elevation movable upper surface plate 15, a carrier fitted with a work 16 is arranged and meshed with an internal gear 13 and sun gear 14, then the lower surface plate 12 and each of the gears 13, 14 are rotated to revolve the carrier about the sun ger and rotate on its axis, thus upper and lower sides of the work can be performed lapping. In a stage of lapping work in progress with the second lapping liquid necessary, the first lapping liquid pump is stopped simultaneously the second lapping liquid pump is started rotating, if only the first solenoid valve 35 is synchronously turned ON, a piston rod 30 of the first cylinder 29 moves forward to operate a driving means 37, and a discharge trough 21 is turned about the center of discharge port 20, then the trough 21 is changed over so that is another end opening 21b may be situated on a discharge liquid receiving unit of the second lapping liquid tank. |
