| 摘要 |
PURPOSE:To prevent the photomask from deforming, to improve the accuracy, and to repeating the same process scores of times by forming a reflecting film which reflects irradiation light sufficiently at a shield part. CONSTITUTION:For example, many small holes are formed as a mask pattern in a thin plate 4 of stainless steel, ceramic, etc., to form transmission parts where light is transmitted and shield parts 6 where the light is cut off. The reflecting films 7 which reflect light with target wavelength are formed at the shield parts 6 so as to prevent thermal variation due to light absorption. The reflecting films 7 are formed of, for example, Al vapor-deposited films or dielectric multi-layered films which reflect ultraviolet rays of, for example, 150 - 400nm with high reflectivity. Consequently, the deformation is eliminated regardless of irradiation with laser light, high accuracy of several mum and less is obtained, and the machining is repeated many times. |
