CRYSTAL PULLING APPARATUS AND CRYSTAL PULLING METHOD USING THE SAME

摘要

In a crystal pulling process using an integral type double crucible, a cylindrical separation wall (14) is mounted in and is coaxial with a crucible (1), for receiving semiconductor material melt to divide the crucible (1) into inner and outer chambers (20, 21). A coupling tube (16) fixed at the side wall of the separation wall (14) and having a pipe-like passage with a small hole (15) is provided to make a pass between the inner and outer chambers. While material melt in the outer chamber (21) is being supplied to the inner chamber (20) via the coupling tube (16), crystal is pulled from the melt received in the inner chamber (20) and having an impurity composition different from that of the melt in the outer chamber (21).