Verfahren zur Herstellung dielektrischer Keramik für elektrostatische Haltevorrichtungen.
摘要
A dielectric ceramic for use in an electrostatic chuck, formed by firing in a reducing atmosphere a ceramic material mainly comprised of alumina, wherein said ceramic material comprises an alkaline earth metal in an amount of from 1.0 to 6.0 % by weight in terms of oxide and a transition metal in an amount of from 0.5 to 6.0 % by weight in terms of oxide. Also disclosed is a method of making a dielectric ceramic for use in an electrostatic chuck, comprising firing a ceramic material mainly comprised of alumina and containing from 1.0 to 6.0 % by weight of an alkaline earth metal in terms of oxide and from 1.0 to 6.0 % by weight of a transition metal in terms of oxide, in a reducing atmosphere while controlling the dew point of atmosphere gas.
申请公布号
DE68909665(T2)
申请公布日期
1994.02.10
申请号
DE1989609665T
申请日期
1989.04.24
申请人
TOTO LTD., KITAKYUSHU, FUKUOKA, JP
发明人
WATANABE, TOSHIYA C/O TOTO LIMITED, CHIGASAKI-SHI KANAGAWA, JP;KITABAYASHI, TETSUO C/O TOTO LIMITED, CHIGASAKI-SHI KANAGAWA, JP;NAKAYAMA, CHIAKI C/O TOTO LIMITED, CHIGASAKI-SHI KANAGAWA, JP