| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-performance solar battery with high yield. SOLUTION: In the manufacture of a CIS(CuInSe2 ) group thin-film solar battery, at least one of a CIS group thin film 3/buffer layer, and a CIS group thin film/buffer layer/TOC (transparent conductive film) is patterned with an end mill 10 which rotates at high speed. At the time, the end mill's rotation speed is preferably, at 10,000-50,000r.p.m, while the height, direction and load of tool tip of the end mill are controlled. |
