发明名称 Method of fabricating a multi-element acoustic probe, especially an echography probe
摘要 The invention relates to a method of fabricating medical echography probes. It consists in establishing a connection network (108) to the elementary transducers of this probe cut out in a piezoelectric sheet (101), by forming holes (104) in a polymer film (102) on which the piezoelectric layer rests with the aid of a photo-ablation process or of a reactive ion plasma etching process. The connections (108) are also obtained by metallisation then etching; the metallisation making it possible to provide the connection by means of holes. It makes it possible to obtain medical probes, the beam of which can be focused and oriented in all directions in space. <IMAGE>
申请公布号 FR2702309(A1) 申请公布日期 1994.09.09
申请号 FR19930002586 申请日期 1993.03.05
申请人 THOMSON CSF 发明人 DE FRAGUIER SIXTE;GELLY JEAN-FRANCOIS;BUREAU JEAN-MARC
分类号 B06B1/06;H01L41/29;(IPC1-7):H01L41/22;G01N29/00 主分类号 B06B1/06
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