发明名称 |
PHOTOSENSITIVE POLYIMIDE PRECURSOR COMPOSITION AND METAL FOIL-POLYIMIDE COMPOSITE |
摘要 |
PROBLEM TO BE SOLVED: To obtain the photosensitive composition free from any problem on mechanical strength and heat resistance and flexibility and low in linear expansion coefficient and further superior in patterning workability by incorporating a specified polyimide precursor and photopolymerization initiator. SOLUTION: This composition contains the photopolymerization initiator and the photosensitive polyimide precursor represented by the formula in which R<1> is a >=2C tri- or tetra-valent acid residue; R<2> is an aromatic diamine residue or a >=2C aliphatic diamine residue; R<3> is a -OR<4> , -NHR<4> , or -O<-> N<+> R<4> R<5> R<6> R<7> group; but R<4> is a group having an ethylenically unsaturated bond; each of R<5> -R<7> is an H atom or a 1-10C alkyl group; and (n) is 1 or 2. The film obtained by forming this composition into a film form and curing it has a linear expansion coefficient of 10×10<-6> -30×10<-6> / deg.C at 30 deg.C. |
申请公布号 |
JPH1130861(A) |
申请公布日期 |
1999.02.02 |
申请号 |
JP19980128715 |
申请日期 |
1998.05.12 |
申请人 |
TORAY IND INC |
发明人 |
FUJIMOTO KOJI;MIURA YASUO |
分类号 |
G03F7/038;B32B15/08;B32B15/088;C08L79/08;G03F7/09;H01L21/027;(IPC1-7):G03F7/038 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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