发明名称 PHOTOSENSITIVE POLYIMIDE PRECURSOR COMPOSITION AND METAL FOIL-POLYIMIDE COMPOSITE
摘要 PROBLEM TO BE SOLVED: To obtain the photosensitive composition free from any problem on mechanical strength and heat resistance and flexibility and low in linear expansion coefficient and further superior in patterning workability by incorporating a specified polyimide precursor and photopolymerization initiator. SOLUTION: This composition contains the photopolymerization initiator and the photosensitive polyimide precursor represented by the formula in which R<1> is a >=2C tri- or tetra-valent acid residue; R<2> is an aromatic diamine residue or a >=2C aliphatic diamine residue; R<3> is a -OR<4> , -NHR<4> , or -O<-> N<+> R<4> R<5> R<6> R<7> group; but R<4> is a group having an ethylenically unsaturated bond; each of R<5> -R<7> is an H atom or a 1-10C alkyl group; and (n) is 1 or 2. The film obtained by forming this composition into a film form and curing it has a linear expansion coefficient of 10×10<-6> -30×10<-6> / deg.C at 30 deg.C.
申请公布号 JPH1130861(A) 申请公布日期 1999.02.02
申请号 JP19980128715 申请日期 1998.05.12
申请人 TORAY IND INC 发明人 FUJIMOTO KOJI;MIURA YASUO
分类号 G03F7/038;B32B15/08;B32B15/088;C08L79/08;G03F7/09;H01L21/027;(IPC1-7):G03F7/038 主分类号 G03F7/038
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