发明名称 |
Integrated hybrid silicon-based micro-reflector |
摘要 |
A light reflective device including an insulative substrate; a silicon wafer positioned over the insulative substrate and defining an opening and having a flexible beam portion having top and bottom surfaces which extend into the opening; a layer of ferromagnetic material formed over the top surface of the flexible beam portion; a reflector formed over the ferromagnetic layer on the top surface of the flexible beam portion; and a micro-electromagnet mounted on the insulative substrate relative to the opening of the silicon wafer and adapted to produce a magnetic field in response to an applied current which acts on the ferromagnetic layer to cause the bending of the flexible beam portion, ferromagnetic layer and reflector.
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申请公布号 |
US5910856(A) |
申请公布日期 |
1999.06.08 |
申请号 |
US19980061619 |
申请日期 |
1998.04.16 |
申请人 |
EASTMAN KODAK COMPANY |
发明人 |
GHOSH, SYAMAL K.;FURLANI, EDWARD P.;CHATTERJEE, DILIP K. |
分类号 |
G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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