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经营范围
发明名称
CHEMICAL CABINET
摘要
申请公布号
JPH11204398(A)
申请公布日期
1999.07.30
申请号
JP19980002612
申请日期
1998.01.08
申请人
TOKYO ELECTRON LTD
发明人
SUETSUGU MASACHIKA;KIMURA YOSHIO
分类号
H01L21/677;H01L21/027;H01L21/68;(IPC1-7):H01L21/027
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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