发明名称 METHOD OF MANUFACTURING FED
摘要 PURPOSE: A method for manufacturing a field emitter display device is provided to improve characteristics of a field emission display device by forming an emitter tip using a diamond. CONSTITUTION: A pixel protective layer is formed on one side of a silicon substrate. A diamond crystal is grown on the other side of the silicon substrate. The diamond crystal of a predetermined size remains by etching the diamond crystal. The silicon substrate is etched by using the diamond crystal and the pixel protective layer as a mask. An insulating layer(17) and a metal thin film(19) are formed on a whole structure. A photoresist layer is applied on the metal thin film(19). The diamond crystal, the insulating layer(17), and the metal thin film(19) are exposed by etching the photoresist layer. The insulating layer(17) and the metal thin film(19) are etched. The photoresist layer is removed.
申请公布号 KR100260258(B1) 申请公布日期 2000.07.01
申请号 KR19970064925 申请日期 1997.11.29
申请人 ORION ELECTRIC CO., LTD. 发明人 JEONG, BOK-HYEON
分类号 H01J9/02;(IPC1-7):H01J9/02 主分类号 H01J9/02
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