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发明名称
摘要
申请公布号
JP3161516(B2)
申请公布日期
2001.04.25
申请号
JP19970288056
申请日期
1997.10.03
申请人
发明人
分类号
H01L21/265;H01L21/338;H01L27/10;H01L29/778;H01L29/812;(IPC1-7):H01L29/778
主分类号
H01L21/265
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