发明名称 |
DEHUMIDIFICATION SYSTEM AND DEHUMIDIFICATION METHOD |
摘要 |
<p>A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent. <IMAGE></p> |
申请公布号 |
EP1508359(A1) |
申请公布日期 |
2005.02.23 |
申请号 |
EP20030730630 |
申请日期 |
2003.05.26 |
申请人 |
TOKYO ELECTRON LIMITED;NICHIAS CORPORATION |
发明人 |
MOTONO, HIROSHI;TANAHASHI, TAKASHI;KUROSAWA, MASAJI;YAMASHITA, KATSUHIRO |
分类号 |
B01D53/06;B01D53/08;B01D53/26;B01D53/28;F24F3/14;(IPC1-7):B01D53/26 |
主分类号 |
B01D53/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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