发明名称 DEHUMIDIFICATION SYSTEM AND DEHUMIDIFICATION METHOD
摘要 <p>A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent. &lt;IMAGE&gt;</p>
申请公布号 EP1508359(A1) 申请公布日期 2005.02.23
申请号 EP20030730630 申请日期 2003.05.26
申请人 TOKYO ELECTRON LIMITED;NICHIAS CORPORATION 发明人 MOTONO, HIROSHI;TANAHASHI, TAKASHI;KUROSAWA, MASAJI;YAMASHITA, KATSUHIRO
分类号 B01D53/06;B01D53/08;B01D53/26;B01D53/28;F24F3/14;(IPC1-7):B01D53/26 主分类号 B01D53/06
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